https://data.archives-ouvertes.fr/author/180198

https://data.archives-ouvertes.fr/author/180198

http://xmlns.com/foaf/0.1/topic_interest Optimal systems
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/chim.mate
http://xmlns.com/foaf/0.1/name Lionel Buchaillot
http://xmlns.com/foaf/0.1/topic_interest Atomic force microscopy
http://xmlns.com/foaf/0.1/topic_interest Microstructure
http://xmlns.com/foaf/0.1/topic_interest SDA
http://xmlns.com/foaf/0.1/topic_interest Plasma properties
http://xmlns.com/foaf/0.1/topic_interest Gold
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/phys.hist
http://xmlns.com/foaf/0.1/topic_interest Electrodes
http://xmlns.com/foaf/0.1/topic_interest Resonance
http://xmlns.com/foaf/0.1/topic_interest Nanofilm
http://xmlns.com/foaf/0.1/topic_interest In-plane resonator
http://xmlns.com/foaf/0.1/topic_interest Logic gates
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/phys.meca.acou
http://xmlns.com/foaf/0.1/topic_interest Actuators
http://xmlns.com/foaf/0.1/topic_interest Résonateur piézoélectrique
http://xmlns.com/foaf/0.1/topic_interest Performance analysis
http://xmlns.com/foaf/0.1/topic_interest Electric variables measurement
http://xmlns.com/foaf/0.1/topic_interest On-chip micro-devices
http://xmlns.com/foaf/0.1/topic_interest Blades
http://xmlns.com/foaf/0.1/topic_interest MEMS pull-in effect dynamic response
http://xmlns.com/foaf/0.1/topic_interest AFM
http://xmlns.com/foaf/0.1/topic_interest Porous carbon
http://xmlns.com/foaf/0.1/topic_interest Carbon Nanotubes
http://xmlns.com/foaf/0.1/topic_interest Ondes guidées
http://xmlns.com/foaf/0.1/topic_interest Microtechnology
http://xmlns.com/foaf/0.1/topic_interest Micro Nano Systèmes
http://xmlns.com/foaf/0.1/topic_interest Optical sensors
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.nano
http://xmlns.com/foaf/0.1/topic_interest Fiabilité
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.nrj
http://xmlns.com/foaf/0.1/topic_interest Nanoindentation
http://xmlns.com/foaf/0.1/topic_interest Multiwall Nanotubes
http://xmlns.com/foaf/0.1/topic_interest Résonateur
http://xmlns.com/foaf/0.1/topic_interest Micro Mécanique
http://xmlns.com/foaf/0.1/topic_interest Hall–Petch
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.tron
http://xmlns.com/foaf/0.1/topic_interest Microactuators
http://xmlns.com/foaf/0.1/topic_interest Capacitive sensors
http://xmlns.com/foaf/0.1/topic_interest Mechanics
http://xmlns.com/foaf/0.1/topic_interest SON
http://xmlns.com/foaf/0.1/topic_interest Aluminium
http://xmlns.com/foaf/0.1/topic_interest Nanometerscale resonator
http://xmlns.com/foaf/0.1/topic_interest Optical ring resonators
http://xmlns.com/foaf/0.1/topic_interest Silicon
http://xmlns.com/foaf/0.1/topic_interest Anisotropy
http://xmlns.com/foaf/0.1/topic_interest Microsystèmes
http://xmlns.com/foaf/0.1/topic_interest Oscillators
http://xmlns.com/foaf/0.1/topic_interest Heuristic methods
http://xmlns.com/foaf/0.1/topic_interest Force measurement
http://xmlns.com/foaf/0.1/topic_interest Genetic algorithms
http://xmlns.com/foaf/0.1/topic_interest MEMS
http://xmlns.com/foaf/0.1/topic_interest Finite element evaluations
http://xmlns.com/foaf/0.1/topic_interest Motion estimation
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/phys.cond.cm-ms
http://xmlns.com/foaf/0.1/topic_interest Multi objective evolutionary algorithms
http://xmlns.com/foaf/0.1/topic_interest Nanoscale devices
http://xmlns.com/foaf/0.1/topic_interest Frequency
http://xmlns.com/foaf/0.1/topic_interest Machine design
http://xmlns.com/foaf/0.1/topic_interest Aluminum gallium nitride
http://xmlns.com/foaf/0.1/topic_interest Energy consumption
http://xmlns.com/foaf/0.1/topic_interest Arm
http://xmlns.com/foaf/0.1/topic_interest Biosensors
http://xmlns.com/foaf/0.1/topic_interest Micromechanical resonator
http://xmlns.com/foaf/0.1/topic_interest Micro-supercapacitor
http://xmlns.com/foaf/0.1/topic_interest Fluidics
http://xmlns.com/foaf/0.1/topic_interest Performance evaluation
http://xmlns.com/foaf/0.1/topic_interest Resonant frequency
http://www.w3.org/1999/02/22-rdf-syntax-ns#type http://xmlns.com/foaf/0.1/Person
http://xmlns.com/foaf/0.1/topic_interest Nano
http://xmlns.com/foaf/0.1/topic_interest Micromechanical devices
http://xmlns.com/foaf/0.1/topic_interest Fabrication
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.elec
http://xmlns.com/foaf/0.1/topic_interest Amplitude estimation
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/info.info-oh
http://xmlns.com/foaf/0.1/topic_interest Micro Nano Technologie
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.acou
http://xmlns.com/foaf/0.1/topic_interest Compressive stress
http://xmlns.com/foaf/0.1/topic_interest Filters
http://xmlns.com/foaf/0.1/topic_interest Piezoresistance
http://xmlns.com/foaf/0.1/topic_interest Solid modeling
http://xmlns.com/foaf/0.1/topic_interest Optimal design methods
http://xmlns.com/foaf/0.1/topic_interest Nanotechnology
http://xmlns.com/foaf/0.1/topic_interest Etching
http://xmlns.com/foaf/0.1/topic_interest Geometry
http://xmlns.com/foaf/0.1/topic_interest Oxidation
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.gproc
http://xmlns.com/foaf/0.1/topic_interest Microgripper
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.mat
http://xmlns.com/foaf/0.1/topic_interest Magnetoresistance Oscillation
http://xmlns.com/foaf/0.1/topic_interest Gallium nitride
http://www.w3.org/2002/07/owl#sameAs R-2582-2016
http://xmlns.com/foaf/0.1/familyName Buchaillot
http://xmlns.com/foaf/0.1/topic_interest In-IC integration
http://www.w3.org/2002/07/owl#sameAs https://scholar.google.com/citations?hl=en-US&user=-JFQcGMAAAAJ
http://xmlns.com/foaf/0.1/topic_interest Vibrations
http://xmlns.com/foaf/0.1/topic_interest Electrostatics
http://xmlns.com/foaf/0.1/topic_interest Non-linear stiffness
http://xmlns.com/foaf/0.1/topic_interest Failure analysis
http://xmlns.com/foaf/0.1/topic_interest Plasma applications
http://www.w3.org/2002/07/owl#sameAs 0000-0002-9844-0498
http://xmlns.com/foaf/0.1/topic_interest Micro electromechanical system MEMS
http://www.w3.org/2002/07/owl#sameAs 060779136
http://xmlns.com/foaf/0.1/topic_interest Plasma x-ray sources
http://xmlns.com/foaf/0.1/mbox_sha1sum 1c0cb4c7518824c0cb938dcdbc05fa81
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.meca.mema
http://xmlns.com/foaf/0.1/topic_interest NEMS
http://xmlns.com/foaf/0.1/topic_interest Modeling
http://xmlns.com/foaf/0.1/topic_interest Dynamic voltage scaling
http://www.openarchives.org/ore/terms/isAggregatedBy https://data.archives-ouvertes.fr/author/lionel-buchaillot
http://xmlns.com/foaf/0.1/topic_interest Liquids
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/info.info-ar
http://xmlns.com/foaf/0.1/topic_interest Optical resonators
http://xmlns.com/foaf/0.1/topic_interest Grippers
http://xmlns.com/foaf/0.1/topic_interest Atomic beams
http://xmlns.com/foaf/0.1/topic_interest Shape
http://xmlns.com/foaf/0.1/topic_interest HEMTs
http://xmlns.com/foaf/0.1/topic_interest Electromechanical Resonator
http://xmlns.com/foaf/0.1/firstName Lionel
http://xmlns.com/foaf/0.1/topic_interest Design automation
http://xmlns.com/foaf/0.1/topic_interest Transducers
http://xmlns.com/foaf/0.1/topic_interest Radio-fréquences
http://xmlns.com/foaf/0.1/topic_interest Fatigue
http://xmlns.com/foaf/0.1/topic_interest Particle beams
http://xmlns.com/foaf/0.1/topic_interest Design optimization
http://xmlns.com/foaf/0.1/topic_interest Locking system
http://xmlns.com/foaf/0.1/topic_interest Force
http://xmlns.com/foaf/0.1/topic_interest Probes
http://xmlns.com/foaf/0.1/topic_interest Finite element method
http://xmlns.com/foaf/0.1/topic_interest Metallic Contact
http://xmlns.com/foaf/0.1/topic_interest Piezoresistive detection
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/phys.phys.phys-ins-det
http://xmlns.com/foaf/0.1/topic_interest Nonhomogeneous media
http://xmlns.com/foaf/0.1/topic_interest Electrostatic actuators
https://aurehal.archives-ouvertes.fr/author/180198

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