"Optimal systems"@en . . "Lionel Buchaillot" . "Atomic force microscopy"@en . "Microstructure"@en . "SDA"@fr . "Plasma properties"@en . "Gold"@en . . "Electrodes"@en . "Resonance"@en . "Nanofilm"@en . "In-plane resonator"@en . "Logic gates"@en . . "Actuators"@en . "R\u00E9sonateur pi\u00E9zo\u00E9lectrique"@fr . "Performance analysis"@en . "Electric variables measurement"@en . "On-chip micro-devices"@en . "Blades"@en . "MEMS pull-in effect dynamic response"@en . "AFM"@en . "Porous carbon"@en . "Carbon Nanotubes"@en . "Ondes guid\u00E9es"@fr . "Microtechnology"@en . "Micro Nano Syst\u00E8mes"@fr . "Optical sensors"@en . . "Fiabilit\u00E9"@fr . . "Nanoindentation"@en . "Multiwall Nanotubes"@en . "R\u00E9sonateur"@fr . "Micro M\u00E9canique"@fr . "Hall\u2013Petch"@en . . "Microactuators"@en . "Capacitive sensors"@en . "Mechanics"@en . "SON"@en . "Aluminium"@en . "Nanometerscale resonator"@en . "Optical ring resonators"@en . "Silicon"@en . "Anisotropy"@en . "Microsyst\u00E8mes"@fr . "Oscillators"@en . "Heuristic methods"@en . "Force measurement"@en . "Genetic algorithms"@en . "MEMS"@fr . "Finite element evaluations"@en . "Motion estimation"@en . . "Multi objective evolutionary algorithms"@en . "Nanoscale devices"@en . "Frequency"@en . "Machine design"@en . "Aluminum gallium nitride"@en . "Energy consumption"@en . "Arm"@en . "Biosensors"@en . "Micromechanical resonator"@en . "Micro-supercapacitor"@en . "Fluidics"@en . "Performance evaluation"@en . "Resonant frequency"@en . . "Nano"@en . "Micromechanical devices"@en . "Fabrication"@en . . "Amplitude estimation"@en . . "Micro Nano Technologie"@fr . . "Compressive stress"@en . "Filters"@en . "Piezoresistance"@en . "Solid modeling"@en . "Optimal design methods"@en . "Nanotechnology"@en . "Etching"@en . "Geometry"@en . "Oxidation"@en . . "Microgripper"@en . . "Magnetoresistance Oscillation"@en . "Gallium nitride"@en . . "Buchaillot" . "In-IC integration"@en . . "Vibrations"@en . "Electrostatics"@en . "Non-linear stiffness"@en . "Failure analysis"@en . "Plasma applications"@en . <0000-0002-9844-0498> . "Micro electromechanical system MEMS"@en . <060779136> . "Plasma x-ray sources"@en . "1c0cb4c7518824c0cb938dcdbc05fa81" . . "NEMS"@fr . "Modeling"@en . "Dynamic voltage scaling"@en . . "Liquids"@en . . "Optical resonators"@en . "Grippers"@en . "Atomic beams"@en . "Shape"@en . "HEMTs"@en . "Electromechanical Resonator"@en . "Lionel" . "Design automation"@en . "Transducers"@en . "Radio-fr\u00E9quences"@fr . "Fatigue"@en . "Particle beams"@en . "Design optimization"@en . "Locking system"@en . "Force"@en . "Probes"@en . "Finite element method"@en . "Metallic Contact"@en . "Piezoresistive detection"@en . . "Nonhomogeneous media"@en . "Electrostatic actuators"@en .