<25312719X> . "Saya" . . "Micromachined membrane"@en . "Piezoelectricity"@en . . "Microbalance"@en . "Permanent magnet"@en . "Cantilever"@en . "Daisuke Saya" . "4c396a0a121dd982a07a573083d3a185" . "Resonator"@en . . "Nanocantilevers"@en . "Magnetophoresis"@en . "Electromagnetic MEMS"@en . "Daisuke" . . "Cobalt nanoparticle"@en . "Vibration"@en . "Silicon"@en . "PZT"@en . "NEMS"@en . "Microcontact printing"@en . "Capillary assembly"@en . . . . <0000-0001-5414-9781> .