https://data.archives-ouvertes.fr/author/4144

https://data.archives-ouvertes.fr/author/4144

http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/phys.phys.phys-optics
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/phys.phys.phys-ins-det
http://xmlns.com/foaf/0.1/topic_interest Segregation
http://xmlns.com/foaf/0.1/topic_interest Amplitude and phase demodulation
http://xmlns.com/foaf/0.1/topic_interest Electromechanical coupling
http://xmlns.com/foaf/0.1/topic_interest Finite elements
http://xmlns.com/foaf/0.1/topic_interest Phase transition
http://xmlns.com/foaf/0.1/topic_interest Electric variables measurement
http://xmlns.com/foaf/0.1/topic_interest Resonance
http://xmlns.com/foaf/0.1/topic_interest Electrodes
http://xmlns.com/foaf/0.1/topic_interest MEMS
http://xmlns.com/foaf/0.1/topic_interest Environmental microbiology
http://xmlns.com/foaf/0.1/topic_interest Electrical characterization
http://xmlns.com/foaf/0.1/topic_interest Nanoscale devices
http://xmlns.com/foaf/0.1/topic_interest Gold
http://xmlns.com/foaf/0.1/topic_interest Micro-actionneur
http://xmlns.com/foaf/0.1/topic_interest Electrostatics
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/sde.es
http://xmlns.com/foaf/0.1/topic_interest Force measurement
http://xmlns.com/foaf/0.1/topic_interest Fabrication
http://xmlns.com/foaf/0.1/topic_interest Design optimization
http://xmlns.com/foaf/0.1/familyName Legrand
http://xmlns.com/foaf/0.1/topic_interest CO adsorption
http://xmlns.com/foaf/0.1/topic_interest Filters
http://xmlns.com/foaf/0.1/topic_interest Fatigue
http://xmlns.com/foaf/0.1/topic_interest Alloys
http://xmlns.com/foaf/0.1/topic_interest Probes
http://xmlns.com/foaf/0.1/topic_interest Comb drive
http://xmlns.com/foaf/0.1/topic_interest Atomic beams
http://xmlns.com/foaf/0.1/topic_interest Energy consumption
http://xmlns.com/foaf/0.1/topic_interest Carbon
http://xmlns.com/foaf/0.1/topic_interest Failure analysis
http://xmlns.com/foaf/0.1/topic_interest MEMS pull-in effect dynamic response
http://xmlns.com/foaf/0.1/topic_interest Grippers
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.meca.stru
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.meca.msmeca
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.meca.geme
http://xmlns.com/foaf/0.1/topic_interest Actionnement électrostatique
http://xmlns.com/foaf/0.1/firstName Bernard
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/sde.be
http://xmlns.com/foaf/0.1/topic_interest Spectroscopy
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/phys.cond.cm-ms
http://xmlns.com/foaf/0.1/mbox_sha1sum 92ba1404843206c5e36ccd910c1380a0
http://xmlns.com/foaf/0.1/topic_interest Fluidics
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.mat
http://xmlns.com/foaf/0.1/topic_interest ACL
http://xmlns.com/foaf/0.1/topic_interest Design automation
http://xmlns.com/foaf/0.1/topic_interest Microtechnologies
http://xmlns.com/foaf/0.1/topic_interest Friction
http://xmlns.com/foaf/0.1/topic_interest Electromechanical Resonator
http://xmlns.com/foaf/0.1/topic_interest DFT
http://xmlns.com/foaf/0.1/topic_interest Resonant frequency
http://xmlns.com/foaf/0.1/topic_interest Vibrations
http://xmlns.com/foaf/0.1/topic_interest Silicium
http://xmlns.com/foaf/0.1/topic_interest Logic states
http://xmlns.com/foaf/0.1/topic_interest Oxidation
http://xmlns.com/foaf/0.1/topic_interest Etching
http://xmlns.com/foaf/0.1/topic_interest Lithography
http://xmlns.com/foaf/0.1/topic_interest SON
http://xmlns.com/foaf/0.1/topic_interest Amplitude estimation
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.acou
http://xmlns.com/foaf/0.1/topic_interest Genetic algorithms
http://xmlns.com/foaf/0.1/topic_interest Bimetallic clusters
http://xmlns.com/foaf/0.1/topic_interest Order
http://xmlns.com/foaf/0.1/topic_interest Electrostatic actuators
http://xmlns.com/foaf/0.1/topic_interest Field-programmable gate array FPGA implementations
http://xmlns.com/foaf/0.1/topic_interest Optical ring resonators
http://xmlns.com/foaf/0.1/topic_interest Finite element method
http://xmlns.com/foaf/0.1/topic_interest M/NEMS
http://xmlns.com/foaf/0.1/topic_interest Solid modeling
http://xmlns.com/foaf/0.1/topic_interest Dislocation
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/phys.nexp
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/phys.nucl
http://xmlns.com/foaf/0.1/topic_interest Biosensors
http://xmlns.com/foaf/0.1/topic_interest Compressive stress
http://xmlns.com/foaf/0.1/topic_interest AuPd
http://xmlns.com/foaf/0.1/topic_interest Effet de pull-in
http://xmlns.com/foaf/0.1/topic_interest Dielectric
http://xmlns.com/foaf/0.1/topic_interest Tungsten
http://xmlns.com/foaf/0.1/topic_interest Geometrical nonlinearities
http://xmlns.com/foaf/0.1/topic_interest Micro-capteur
http://xmlns.com/foaf/0.1/topic_interest In-IC integration
http://xmlns.com/foaf/0.1/topic_interest MOS devices
http://www.openarchives.org/ore/terms/isAggregatedBy https://data.archives-ouvertes.fr/author/bernard-legrand
http://xmlns.com/foaf/0.1/topic_interest Shape
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.tron
http://xmlns.com/foaf/0.1/topic_interest Atomic force microscopy
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.signal
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.opti
http://xmlns.com/foaf/0.1/topic_interest Nanotechnologies
http://xmlns.com/foaf/0.1/topic_interest Adiabatic computing
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.nano
http://xmlns.com/foaf/0.1/topic_interest Anisotropy
http://xmlns.com/foaf/0.1/topic_interest Copper
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/spi.meca.vibr
http://xmlns.com/foaf/0.1/topic_interest Dynamic voltage scaling
http://xmlns.com/foaf/0.1/topic_interest Transducers
http://xmlns.com/foaf/0.1/topic_interest Liquids
http://xmlns.com/foaf/0.1/topic_interest Heuristic methods
http://xmlns.com/foaf/0.1/topic_interest Micromechanical devices
http://xmlns.com/foaf/0.1/topic_interest Electron beams
http://xmlns.com/foaf/0.1/topic_interest Critical zone
http://xmlns.com/foaf/0.1/topic_interest Nanoelectromechanical systems
http://www.w3.org/1999/02/22-rdf-syntax-ns#type http://xmlns.com/foaf/0.1/Person
http://xmlns.com/foaf/0.1/topic_interest Micro-résonateur
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/chim.theo
http://xmlns.com/foaf/0.1/topic_interest Comb-drive actuators
http://xmlns.com/foaf/0.1/topic_interest Finite-element analysis
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/chim.mate
http://xmlns.com/foaf/0.1/topic_interest NEMS
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/chim.coor
http://xmlns.com/foaf/0.1/topic_interest Arm
http://xmlns.com/foaf/0.1/topic_interest Capacitive sensors
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/chim.cata
http://www.w3.org/2002/07/owl#sameAs 0000-0001-5158-3654
http://xmlns.com/foaf/0.1/topic_interest Blades
http://xmlns.com/foaf/0.1/topic_interest Resists
http://www.w3.org/2002/07/owl#sameAs 137439423
http://xmlns.com/foaf/0.1/topic_interest Frequency
http://xmlns.com/foaf/0.1/topic_interest Phase separation
http://xmlns.com/foaf/0.1/topic_interest Finite element evaluations
http://xmlns.com/foaf/0.1/topic_interest MEMS - Micro Electro Mechanical System
http://xmlns.com/foaf/0.1/topic_interest Ab initio calculations
http://xmlns.com/foaf/0.1/topic_interest Silicon
http://www.w3.org/2002/07/owl#sameAs https://scholar.google.fr/citations?user=k0i8Sr0AAAAJ
http://xmlns.com/foaf/0.1/topic_interest Geometry
http://xmlns.com/foaf/0.1/topic_interest Interferometry
http://xmlns.com/foaf/0.1/topic_interest Actuators
http://xmlns.com/foaf/0.1/name Bernard Legrand
http://xmlns.com/foaf/0.1/topic_interest Force
http://xmlns.com/foaf/0.1/topic_interest DRIFTS
http://xmlns.com/foaf/0.1/topic_interest Low latency
http://xmlns.com/foaf/0.1/topic_interest Adiabatic logic
http://xmlns.com/foaf/0.1/topic_interest Comb-drive
http://xmlns.com/foaf/0.1/interest https://data.archives-ouvertes.fr/subject/info.info-ar
http://xmlns.com/foaf/0.1/topic_interest AFM
http://xmlns.com/foaf/0.1/topic_interest In-plane resonator
http://xmlns.com/foaf/0.1/topic_interest Optical sensors
http://xmlns.com/foaf/0.1/topic_interest Catalysis
http://xmlns.com/foaf/0.1/topic_interest Environnement liquide
https://aurehal.archives-ouvertes.fr/author/4144

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