. . "Segregation"@en . "Amplitude and phase demodulation"@en . "Electromechanical coupling"@en . "Finite elements"@en . "Phase transition"@en . "Electric variables measurement"@en . "Resonance"@en . "Electrodes"@en . "MEMS"@fr . "Environmental microbiology"@en . "Electrical characterization"@en . "Nanoscale devices"@en . "Gold"@en . "Micro-actionneur"@fr . "Electrostatics"@en . . "Force measurement"@en . "Fabrication"@en . "Design optimization"@en . "Legrand" . "CO adsorption"@en . "Filters"@en . "Fatigue"@en . "Alloys"@en . "Probes"@en . "Comb drive"@en . "Atomic beams"@en . "Energy consumption"@en . "Carbon"@en . "Failure analysis"@en . "MEMS pull-in effect dynamic response"@en . "Grippers"@en . . . . "Actionnement \u00E9lectrostatique"@fr . "Bernard" . . "Spectroscopy"@en . . "92ba1404843206c5e36ccd910c1380a0" . "Fluidics"@en . . "ACL"@en . "Design automation"@en . "Microtechnologies"@fr . "Friction"@en . "Electromechanical Resonator"@en . "DFT"@en . "Resonant frequency"@en . "Vibrations"@en . "Silicium"@fr . "Logic states"@en . "Oxidation"@en . "Etching"@en . "Lithography"@en . "SON"@en . "Amplitude estimation"@en . . "Genetic algorithms"@en . "Bimetallic clusters"@en . "Order"@en . "Electrostatic actuators"@en . "Field-programmable gate array FPGA implementations"@en . "Optical ring resonators"@en . "Finite element method"@en . "M/NEMS"@en . "Solid modeling"@en . "Dislocation"@en . . . "Biosensors"@en . "Compressive stress"@en . "AuPd"@en . "Effet de pull-in"@fr . "Dielectric"@en . "Tungsten"@en . "Geometrical nonlinearities"@en . "Micro-capteur"@fr . "In-IC integration"@en . "MOS devices"@en . . "Shape"@en . . "Atomic force microscopy"@en . . . "Nanotechnologies"@fr . "Adiabatic computing"@en . . "Anisotropy"@en . "Copper"@en . . "Dynamic voltage scaling"@en . "Transducers"@en . "Liquids"@en . "Heuristic methods"@en . "Micromechanical devices"@en . "Electron beams"@en . "Critical zone"@en . "Nanoelectromechanical systems"@en . . "Micro-r\u00E9sonateur"@fr . . "Comb-drive actuators"@en . "Finite-element analysis"@en . . "NEMS"@fr . . "Arm"@en . "Capacitive sensors"@en . . <0000-0001-5158-3654> . "Blades"@en . "Resists"@en . <137439423> . "Frequency"@en . "Phase separation"@en . "Finite element evaluations"@en . "MEMS - Micro Electro Mechanical System"@en . "Ab initio calculations"@en . "Silicon"@en . . "Geometry"@en . "Interferometry"@en . "Actuators"@en . "Bernard Legrand" . "Force"@en . "DRIFTS"@en . "Low latency"@en . "Adiabatic logic"@en . "Comb-drive"@en . . "AFM"@fr . "In-plane resonator"@en . "Optical sensors"@en . "Catalysis"@en . "Environnement liquide"@fr .