dataHAL.science
Support
https://data.archives-ouvertes.fr/author/775138
https://data.archives-ouvertes.fr/author/775138
http://xmlns.com/foaf/0.1/familyName
Lundin
http://xmlns.com/foaf/0.1/topic_interest
Thin film
http://xmlns.com/foaf/0.1/interest
https://data.archives-ouvertes.fr/subject/spi.plasma
http://xmlns.com/foaf/0.1/firstName
Daniel
http://xmlns.com/foaf/0.1/topic_interest
Residual stress
http://xmlns.com/foaf/0.1/topic_interest
Intrinsic stress
http://xmlns.com/foaf/0.1/interest
https://data.archives-ouvertes.fr/subject/sde.be
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://xmlns.com/foaf/0.1/Person
http://xmlns.com/foaf/0.1/name
Daniel Lundin
http://xmlns.com/foaf/0.1/topic_interest
Thin films
http://xmlns.com/foaf/0.1/interest
https://data.archives-ouvertes.fr/subject/spi.gproc
http://xmlns.com/foaf/0.1/topic_interest
High power impulse magnetron sputtering
http://xmlns.com/foaf/0.1/interest
https://data.archives-ouvertes.fr/subject/sdv.bbm
http://xmlns.com/foaf/0.1/interest
https://data.archives-ouvertes.fr/subject/phys.phys.phys-plasm-ph
http://xmlns.com/foaf/0.1/topic_interest
Copper
http://www.w3.org/2002/07/owl#sameAs
232893020
http://xmlns.com/foaf/0.1/topic_interest
Structural properties
http://xmlns.com/foaf/0.1/interest
https://data.archives-ouvertes.fr/subject/sdv.mp.bac
http://xmlns.com/foaf/0.1/topic_interest
Electronic devices
http://xmlns.com/foaf/0.1/topic_interest
Titanium nitride
http://xmlns.com/foaf/0.1/topic_interest
Nucleation and growth
http://xmlns.com/foaf/0.1/topic_interest
Substrate bias synchronization
http://www.w3.org/2002/07/owl#sameAs
0000-0001-8591-1003
http://xmlns.com/foaf/0.1/topic_interest
HiPIMS
http://xmlns.com/foaf/0.1/interest
https://data.archives-ouvertes.fr/subject/chim.mate
http://xmlns.com/foaf/0.1/interest
https://data.archives-ouvertes.fr/subject/sdv.bid
https://aurehal.archives-ouvertes.fr/author/775138
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