"Lundin" . "Thin film"@en . . "Daniel" . "Residual stress"@en . "Intrinsic stress"@en . . . "Daniel Lundin" . "Thin films"@en . . "High power impulse magnetron sputtering"@en . . . "Copper"@en . <232893020> . "Structural properties"@en . . "Electronic devices"@en . "Titanium nitride"@en . "Nucleation and growth"@en . "Substrate bias synchronization"@en . <0000-0001-8591-1003> . "HiPIMS"@en . . .