"F. Garrido" . "Nanostructure"@en . "cfdea8cff95de7d4c695b82c8f799d6d" . "F." . "SiC"@en . "Irradiation"@en . "Grazing incidence X ray diffraction"@en . "Garrido" . . "Rutherford Backscattering Spectrometry"@en . . "Single crystalline"@en .