"Spectra"@en . "Maziar" . "Deposition"@en . "Nitride"@en . "Maziar Shakerzadeh" . "Overcoat"@en . "Energy"@en . . "Sp3"@en . "0834c9b03f7911f6ac8a9da62485f0ac" . "Raman"@en . . . "Nitrogenated amorphous carbon"@en . "Nanoscratch"@en . "Surface energy"@en . "Shakerzadeh" . "Thermal stability"@en .